源语言标题

(WO2017113368) 一种​碳化硅​晶体​生长​用​坩埚

公开号/公开日

WO2017113368 A1 2017-07-06 [WO2017113368] / 2017-07-06

申请号/申请日

2015WO-CN100284 / 2015-12-31

发明人

KONG HAIKUAN;XIN JUN;CHEN JIANJUN;ZHENG YANQING;SHI ERWEI;

申请人

SHANGHAI INSTITUTE OF CERAMICS CHINESE ACADEMY OF SCIENCES;

主分类号

IPC分类号

C30B-023/02C30B-029/36

摘要

(WO2017113368) 本​发明​涉及​一种​碳化硅​晶体​生长​用​坩埚，包括：用于​盛放​SiC​晶体​生长​用​原料​的​原料​腔(2)；相对​移动​地​嵌套​于​所​述​原料​腔(2)的​上​部内​以​形成​晶体​结晶​区域​的​生长​腔(1)，所​述​生长​腔(1)具备​生长​室(4)、和​设于​所​述​生长​室(4)的​顶​壁上​的​籽​晶​托(3)。本​发明​的​坩埚​能够​在​生长​过程中​调节​晶体​表面​与​原料​表面的​距离，保持​温度场​的​稳定性，从而​生长出​高质量​碳化硅​晶体​的​碳化硅​晶体​生长​用​坩埚。

地址

代理人

代理机构

;

优先权号

2015CN-1006394 2015-12-29

主权利要求

法律状态

(WO2017113368) LEGAL DETAILS FOR WO2017113368  Actual or expected expiration date=2019-06-29    Legal state=ALIVE    Status=PENDING     Event publication date=2015-12-31  Event code=WO/APP  Event indicator=Pos  Event type=Examination events  Application details  Application country=WO WOCN2015100284  Application date=2015-12-31  Standardized application number=2015WO-CN100284     Event publication date=2017-07-06  Event code=WO/A1  Event type=Examination events  Published application with search report  Publication country=WO  Publication number=WO2017113368  Publication stage Code=A1  Publication date=2017-07-06  Standardized publication number=WO2017113368  LEGAL DETAILS FOR DESIGNATED STATE EP  Actual or expected expiration date=2035-12-29    Legal state=ALIVE    Status=PENDING   Corresponding cc:  Designated or member state=EP Corresponding appl: EP15911993    Event publication date=2017-09-06  Event code=WO/121  Event type=Designated states  EP: The EPO has been informed by wipo that ep was designated in this application Corresponding cc:  Designated or member state=EP

专利类型码

A1

国别省市代码

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