一种​碳化硅​晶体​生长​用​坩埚

源语言标题
(WO2017113368) 一种​碳化硅​晶体​生长​用​坩埚
公开号/公开日
WO2017113368 A1 2017-07-06 [WO2017113368] / 2017-07-06
申请号/申请日
2015WO-CN100284 / 2015-12-31
发明人
KONG HAIKUAN;XIN JUN;CHEN JIANJUN;ZHENG YANQING;SHI ERWEI;
申请人
SHANGHAI INSTITUTE OF CERAMICS CHINESE ACADEMY OF SCIENCES;
主分类号
IPC分类号
C30B-023/02C30B-029/36
摘要
(WO2017113368) 本​发明​涉及​一种​碳化硅​晶体​生长​用​坩埚,包括:用于​盛放​SiC​晶体​生长​用​原料​的​原料​腔(2);相对​移动​地​嵌套​于​所​述​原料​腔(2)的​上​部内​以​形成​晶体​结晶​区域​的​生长​腔(1),所​述​生长​腔(1)具备​生长​室(4)、和​设于​所​述​生长​室(4)的​顶​壁上​的​籽​晶​托(3)。本​发明​的​坩埚​能够​在​生长​过程中​调节​晶体​表面​与​原料​表面的​距离,保持​温度场​的​稳定性,从而​生长出​高质量​碳化硅​晶体​的​碳化硅​晶体​生长​用​坩埚。
地址
代理人
代理机构
;
优先权号
2015CN-1006394 2015-12-29
主权利要求

        
法律状态
(WO2017113368) LEGAL DETAILS FOR WO2017113368  Actual or expected expiration date=2019-06-29    Legal state=ALIVE    Status=PENDING     Event publication date=2015-12-31  Event code=WO/APP  Event indicator=Pos  Event type=Examination events  Application details  Application country=WO WOCN2015100284  Application date=2015-12-31  Standardized application number=2015WO-CN100284     Event publication date=2017-07-06  Event code=WO/A1  Event type=Examination events  Published application with search report  Publication country=WO  Publication number=WO2017113368  Publication stage Code=A1  Publication date=2017-07-06  Standardized publication number=WO2017113368  LEGAL DETAILS FOR DESIGNATED STATE EP  Actual or expected expiration date=2035-12-29    Legal state=ALIVE    Status=PENDING   Corresponding cc:  Designated or member state=EP Corresponding appl: EP15911993    Event publication date=2017-09-06  Event code=WO/121  Event type=Designated states  EP: The EPO has been informed by wipo that ep was designated in this application Corresponding cc:  Designated or member state=EP
专利类型码
A1
国别省市代码
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