Optimization of N-doped TiO2 multifunctional thin layers by low frequency PECVD process 机翻标题: 暂无翻译,请尝试点击翻译按钮。

来源
Journal of the European Ceramic Society
年/卷/期
2017 / 37 / 16 S1
页码
5289-5303
ISSN号
0955-2219
作者单位
Univ Montpellier, CNRS, UMR5635, IEM,ENSCM, Pl Eugene Bataillon,CC047, F-34095 Montpellier 5, France;Univ Montpellier, CNRS, UMR5635, IEM,ENSCM, Pl Eugene Bataillon,CC047, F-34095 Montpellier 5, France;Lebanese Univ, Lab Chim Phys Mat LCPM, Plateforme Rech Nanosci PR2N, BP 90656 Fanar, Beirut, Lebanon;Univ Montpellier, CNRS, UMR5635, IEM,ENSCM, Pl Eugene Bataillon,CC047, F-34095 Montpellier 5, France;Univ Montpellier, CNRS, UMR5635, IEM,ENSCM, Pl Eugene Bataillon,CC047, F-34095 Montpellier 5, France;Lebanese Univ, Lab Chim Phys Mat LCPM, Plateforme Rech Nanosci PR2N, BP 90656 Fanar, Beirut, Lebanon;Lebanese Univ, Lab Chim Phys Mat LCPM, Plateforme Rech Nanosci PR2N, BP 90656 Fanar, Beirut, Lebanon;Univ Montpellier, CNRS, UMR5635, IEM,ENSCM, Pl Eugene Bataillon,CC047, F-34095 Montpellier 5, France;
作者
Leoga, Arnaud Joel Kinfack;Roualdes, Stephanie;Zakhour, Mirvat;Rouessac, Vincent;Ayral, Andre;Nakhl, Michel;Bassil, Joelle;Youssef, Loraine;
摘要
A one-step low-frequency Plasma Enhanced Chemical Vapor Deposition (PECVD) process, operating at temperature as low as 350 degrees C, has been implemented to prepare single-oriented pure and N-doped anatase films. The layers have been synthesized using titanium isopropoxide as a precursor, and NH3 as a doping agent. Optimized PECVD conditions have enabled to obtain homogeneous micro-columnar porous thin films with thicknesses close to 500 nm. Depth profiling XPS analyses have proved the nitrogen incorporation into TiO2 lattice after ammonia introduction in the deposition chamber. As another proof of N-doping, Raman and XRD peaks shifting have been observed. Such thin films have been demonstrated as efficient photocatalytic materials which activity region can be tailored from UV to visible region by adjusting the proportion of doping agent in the plasma phase. Due to their microstructural and photo catalytic properties, the prepared thin layers should have an interest as anode materials in solar water splitting cells. (C) 2017 Elsevier Ltd. All rights reserved.
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关键词/主题词
TiO2;Low-frequency plasma;N-doping;Photocatalysis;
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