多层​钛酸钡​与​多层​铁​酸​钴​磁电​复合​薄膜​的​制备​与​转移​方法

源语言标题
(CN104692828B) 多层​钛酸钡​与​多层​铁​酸​钴​磁电​复合​薄膜​的​制备​与​转移​方法
公开号/公开日
CN104692828 A 2015-06-10 [CN104692828]CN104692828 B 2017-08-29 [CN104692828B] / 2015-06-102017-08-29
申请号/申请日
2015CN-0101254 / 2015-03-06
发明人
LU XIAOLI;ZHANG JIWEN;ZHANG CHUNFU;ZHANG JINCHENG;HAO YUE;
申请人
XIDIAN UNIVERSITY;
主分类号
IPC分类号
H01L-043/12
摘要
(CN104692828B) 本​发明​公开​了​种​多层​钛酸钡​与​多层​铁​酸​钴​磁电​复合​薄膜​的​制备​与​转移​方法,主要​解决​现有​1‑3​结构​的​复合材料​不能​同时​减小​衬底​钳制​效应​和​漏电​的​问题。其​实现​步骤​是:先在​蓝宝石​衬底​沉积层​氧化镁​薄膜,并在​其上​交错​沉积​多层​铁​酸​钴​薄膜​和​多层​钛酸钡​薄膜;再​在​最后​层​钛酸钡​薄膜​表面​旋​涂上​聚​甲基​丙烯酸​甲酯,用​硫酸铵​溶液​除去​单晶​氧化镁​薄膜,使​附有​聚​甲基​丙烯酸​甲酯​的​磁电​复合​薄膜​与​蓝宝石​衬底​脱离;再将​脱离​蓝宝石​衬底​的​磁电​复合​薄膜​转移​到​后续​所需​的​衬底​上,得到​多层​铁​酸​钴​薄膜​和​多层​钛酸钡​薄膜​复合​的​自​支撑​磁电​薄膜。本​发明​得到​的​多层​钛酸钡​和​多层​铁​酸​钴​复合​薄膜​表面​耦合​大,增强​了​磁电​特性,减小​了​衬底​钳制​和​漏电​问题,可用​于​磁电​传感器​的​制备。
地址
代理人
代理机构
;
优先权号
2015CN-0101254 2015-03-06
主权利要求
(CN104692828B) 1. A multi-layered composite film with the cobalt iron layers of barium titan ate producing a magneto-electric transducer with a transfer method, comprising the steps of: 1) grown on the magnesium oxide film is in the C-plane sapphire substrate; C-plane sapphire substrate to, a magnesium oxide target, cobalt and iron is placed in a pulsed laser target barium target titanated of a deposition system in the reaction chamber, the reaction chamber is evacuated, until the degree of vacuum becomes 4x10-6 mbaror less, to the reaction chamber by introducing oxygen, the reaction chamber is maintained at a pressure of oxygen of the 5x10-3 -0.1mbar; Opening the laser switch, the setting of the laser energy density in the range 4 J/cm2 and a frequency of 3-5Hz, setting of a substrate at a temperature of 600-700 Ć, through the laser beam, a magnesium oxide target ablation 10000-15000 times, C is deposited on the surface of the magnesium oxide to a plasma by burning on the sapphire substrate, the growth of a magnesium oxide thin film is completed; 2) thin-film magnesium oxide layer in the thin film of cobalt ferrite is deposited on the 1st: An oxygen into the chamber is adjusted, so that an oxygen pressure in the reaction chamber is maintained 0.01-0.5 mbar, setting of the laser energy density of 2.4 J/cm2 and a frequency of 3-5Hz, setting of a substrate at a temperature of 650-700 Ć, a laser beam through, cobalt target ferrlte YAKE 500-1000 times, a magnesium oxide film is deposited on the cobalt iron with the plasma, the layer thickness is completed 1st 20-40 nm of the growth of the thin film of cobalt ferrite; 3) is deposited on the thin film of cobalt in the 1st layer a layer of barium ferrite film 1st: Oxygen into the chamber of the adjustment, that an oxygen pressure of the reaction chamber is maintained at a 0.01-0.5 mbar, setting of the laser energy density of 2 J/cm2 and a frequency of 3-5Hz, setting of a substrate at a temperature of 600-700 Ć, a laser beam through, barium target titanated YAKE 500-1000 times, out of the 1st layer of the barium in the burn plasma deposited on the thin film of cobalt ferrite, 1st layer having a thickness of completed 10-20 nm bari of the thin film growth; 4) in the 1st layer is deposited on the thin-film barium ferrite thin film of cobalt 2nd layer: Adjustment of the oxygen into the chamber, the reaction chamber is maintained at a pressure of oxygen of the 0.01-0.5 mbar, setting of the laser energy density of 2.4 J/cm2 and a frequency of 3-5Hz, setting of a substrate at a temperature of 650-700 Ć, a laser beam through, cobalt target ferrlte YAKE 500-1000 times, in the 1st layer is deposited on the thin-film barium plasma group consisting of cobalt ferrite, 2nd layer having a thickness of completed 20-40 nm of the growth of the thin film of cobalt ferrite; 5) depositing a thin film of cobalt ferrite in the 2nd layer 2nd layer thin film of barium titan ate: An oxygen into the chamber is adjusted, so that an oxygen pressure in the reaction chamber is maintained 0.01-0.5 mbar, setting of the laser energy density of 2 J/cm2 and a frequency of 3-5Hz, setting of a substrate at a temperature of 600-700 Ć, a laser beam through, barium target titanated YAKE 500-1000 times, out of the 2nd layer in the plasma deposition of barium titan ate YAKE group consisting of iron cobalt film, the layer thickness is completed 2nd 10-20 nm of the growth of the thin-film barium, cobalt iron layer that forms a four composite thin-film magneto-barium titan ate; 6) forming a cobalt iron PMMA polymethyl methacrylate is attached with the magneto-electric composite thin-film barium: 2nd surface spin coating a layer of titan layer of the film at a concentration of 3-9 mg/mL solution of the PMMA polymethyl methacrylate, and placed in a heating stage, in a 70-80 Ć under heat 5-10 minutes, air cooled, forming a layer of PMMA polymethyl methacrylate group consisting of cobalt ferrite attached to the composite thin film barium magneto-electric transducer; 7) will be appended with polymethyl methacrylate group consisting of cobalt ferrite of the magnetic-electric thin-film barium PMMA separated from the substrate composite: PMMA of the spin-coated with barium ferrite polymethyl methacrylate group consisting of cobalt composite film is immersed in the magnetic-electric 75-85 Ć at a temperature of 10 wt % ammonium sulfate solution 3-4 hours, a magnesium oxide film is removed, of the group consisting of cobalt ferrite attached to the magnetic-electric PMMA polymethylmethacrylate film and the substrate out of barium composite, of the ammonium sulfate solution on the floating; 8) a four-layered self-supporting composite thin-film magneto-electric transducer to the transfer: An electrode substrate for a subsequent use of a desired floating PMMA and pulling of the group consisting of cobalt ferrite polymethyl methacrylate and equipped with a magneto electric composite thin-film barium, placed on a heating stage, in the 35-40 Ć under heat 5-10 minutes, air cooled, the magnetic-electric composite thin film is completely used in the following attached to a desired electrode substrate; Group consisting of acetone then introduced into a solution for 12-24 hours, then removing the surface of the PMMA polymethyl methacrylate, completion of the transfer, to obtain two layers of cobalt iron layer of barium tantalate and using both of the two materials is prepared has a thickness of 60-120 nm from a four-layer thin film composite the magnetic-electric support. 2. A multi-layered composite film with the cobalt iron layers of barium titan ate producing a magneto-electric transducer with a transfer method, comprising the steps of: 1) grown on the magnesium oxide film is in the C-plane sapphire substrate; 1a) and the C-plane sapphire substrate, a magnesium oxide target, cobalt and iron is placed in a pulsed laser target barium target titanated of a deposition system in the reaction chamber, the reaction chamber is evacuated, until the degree of vacuum becomes 4x10-6 mbaror less, to the reaction chamber by introducing oxygen, the reaction chamber is maintained at a pressure of oxygen of the 5x10-3 -0.1mbar; 1b) laser switch is opened, the setting of the laser energy density in the range 4 J/cm2 and a frequency of 3-5Hz, setting of a substrate at a temperature of 600-700 Ć, through the laser beam, a magnesium oxide target ablation 10000-15000 times, the magnesium oxide is deposited on the surface of the burn out of the plasma on a sapphire substrate C, of a magnesium oxide thin film growth is completed; 2) thin-film magnesium oxide layer in the thin film of cobalt ferrite is deposited on the 1st: Oxygen into the chamber of the adjustment, that an oxygen pressure of the reaction chamber is maintained at a 0.01-0.5 mbar, setting of the laser energy density of 2.4 J/cm2 and a frequency of 3-5Hz, setting of a substrate at a temperature of 650-700 Ć, a laser beam through, cobalt target ferrlte YAKE 500-1000 times, a magnesium oxide film is deposited on the cobalt iron with the plasma, the layer thickness is completed 1st 20-40 nm of the growth of the thin film of cobalt ferrite; 3) is deposited on the thin film of cobalt in the 1st layer a layer of barium ferrite film 1st: Adjustment of the oxygen into the chamber, the reaction chamber is maintained at a pressure of oxygen of the 0.01-0.5 mbar, setting of the laser energy density of 2 J/cm2 and a frequency of 3-5Hz, setting of a substrate at a temperature of 600-700 Ć, a laser beam through, barium target titanated YAKE 500-1000 times, out of the 1st layer of the barium in the burn plasma deposition on the thin film of cobalt ferrite, 1st layer having a thickness of completed 10-20 nm bari of the thin film growth, to form a composite thin film cobalt iron layer barium magneto; 4) in the 1st layer is deposited on the thin-film barium ferrite thin film of cobalt 2nd layer: Adjustment of the oxygen into the chamber, the reaction chamber is maintained at a pressure of oxygen of the 0.01-0.5 mbar, setting of the laser energy density of 2.4 J/cm2 and a frequency of 3-5Hz, setting of a substrate at a temperature of 650-700 Ć, a laser beam through, cobalt target ferrlte YAKE 500-1000 times, in the 1st layer is deposited on the thin-film barium plasma group consisting of cobalt ferrite, 2nd layer having a thickness of completed 20-40 nm of the growth of the thin film of cobalt ferrite; 5) depositing a thin film of cobalt ferrite in the 2nd layer 2nd layer thin film of barium titan ate: Oxygen into the chamber of the adjustment, that an oxygen pressure of the reaction chamber is maintained at a 0.01-0.5 mbar, setting of the laser energy density of 2 J/cm2 and a frequency of 3-5Hz, setting of a substrate at a temperature of 600-700 Ć, a laser beam through, barium target titanated YAKE 500-1000 times, out of the 2nd layer to a plasma deposition of the barium in the burning group consisting of iron cobalt film, the layer thickness is completed 2nd 10-20 nm bari of the thin film growth; 6) in a 3rd layer is deposited on the thin film of barium titan ate 2nd layer thin film of cobalt ferrite: An oxygen into the chamber is adjusted, so that an oxygen pressure in the reaction chamber is maintained 0.01-0.5 mbar, setting of the laser energy density of 2.4 J/cm2 and a frequency of 3-5Hz, setting of a substrate at a temperature of 650-700 Ć, a laser beam through, cobalt target ferrlte YAKE 500-1000 times, at the 2nd layer is deposited on the cobalt ferrite thin film of barium titan ate plasma, 3rd layer having a thickness of completed 20-40 nm of the growth of the thin film of cobalt ferrite; 7) in a 3rd layer is deposited on the thin film of cobalt ferrite thin film of barium titan ate 3rd layer: An oxygen into the chamber is adjusted, so that an oxygen pressure in the reaction chamber is maintained 0.01-0.5 mbar, setting of the laser energy density of 2 J/cm2 and a frequency of 3-5Hz, setting of a substrate at a temperature of 600-700 Ć, a laser beam through, barium target titanated YAKE 500-1000 times, so that in the 3rd bari by plasma deposition of a burn layer on the thin film of cobalt ferrite, 3rd layer having a thickness of completed 10-20 nm of the growth of the thin-film barium, cobalt iron layer has a hexagonal barium the magnetic-electric composite film 8) forming a cobalt iron PMMA polymethyl methacrylate is attached with the magneto-electric composite thin-film barium: 3rd layer of the thin film surface spin coating a layer of barium at a concentration of 3-9 mg/mL solution of the PMMA polymethyl methacrylate, and placed in a heating stage, in a 70-80 Ć under heat 5-10 minutes, air cooled, forming a layer of PMMA polymethyl methacrylate group consisting of cobalt ferrite attached to the composite thin film barium magneto-electric transducer; 9) PMMA cobalt iron will be appended with polymethyl methacrylate separated from the substrate composite thin-film magneto-barium: PMMA of the spin-coated with barium ferrite polymethyl methacrylate group consisting of cobalt composite film is immersed in the magnetic-electric 75-85 Ć at a temperature of 10 wt % ammonium sulfate solution 3-4 hours, a magnesium oxide film is removed, of the group consisting of cobalt ferrite attached to the magnetic-electric PMMA polymethylmethacrylate film and the substrate out of barium composite, of the ammonium sulfate solution on the floating; 10) to obtain the six-layered self-supporting composite thin-film magneto-electric transducer transfer: An electrode substrate for a subsequent use of a desired floating PMMA and pulling of the group consisting of cobalt ferrite polymethyl methacrylate and equipped with a magneto electric composite thin-film barium, placed on a heating stage, in the 35-40 Ć under heat 5-10 minutes, air cooled, the magnetic-electric composite thin film is completely used in the following attached to a desired electrode substrate; Group consisting of acetone then introduced into a solution for 12-24 hours, then removing the surface of the PMMA polymethyl methacrylate, completion of the transfer, utilizing a three layered obtained cobalt iron and a layer three barium has a thickness of two materials 90-180 nm a self-supporting composite film a six-layer magneto-electric transducer.
法律状态
(CN104692828B) LEGAL DETAILS FOR CN104692828  Actual or expected expiration date=2035-03-06    Legal state=ALIVE    Status=GRANTED     Event publication date=2015-03-06  Event code=CN/APP  Event indicator=Pos  Event type=Examination events  Application details  Application country=CN CN201510101254  Application date=2015-03-06  Standardized application number=2015CN-0101254     Event publication date=2015-06-10  Event code=CN/A  Event type=Examination events  Published application  Publication country=CN  Publication number=CN104692828  Publication stage Code=A  Publication date=2015-06-10  Standardized publication number=CN104692828     Event publication date=2015-06-10  Event code=CN/C06  Event indicator=Pos  Event type=Examination events  Publication    Event publication date=2015-07-08  Event code=CN/C10  Event type=Examination events  Request of examination as to substance    Event publication date=2017-08-29  Event code=CN/B  Event indicator=Pos  Event type=Event indicating In Force  Granted patent for invention  Publication country=CN  Publication number=CN104692828  Publication stage Code=B  Publication date=2017-08-29  Standardized publication number=CN104692828B
专利类型码
AB
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