(CN105154868) 一种基于抽气方法的纳米涂层沉积装置及方法，用于获得均匀的纳米涂层。所述装置包括稳定基座、控温平台、缓冲平台上和抽气系统，控温平台设置在稳定基座上，基底放置在控温平台。抽气系统包括抽气管、抽气缓冲腔、导气管、真空泵以及调速器。本发明结构简单，操作方便，其技术特点是通过从基底上方抽气的方法改变蒸发过程中液滴内部流动方向，使壁面液滴内部的纳米颗粒向边缘运动，从而可以消除咖啡环现象，实现颗粒的均匀沉积。
(CN105154868) 1. A nano-coating deposition apparatus based on a pumping method, characterized in: device includes a stabilizing base(1), a temperature-controlled platform(2), a buffer platform(6) and the exhausting system; a temperature-controlled platform(2) disposed on the base(1) in a stable; pumping system includes a suction pipe(12), the evacuation buffer chamber(4), connecting nipples(10), tracheal tube(9), the vacuum pump and(8) governor(7); suction in the suction pipe(12) disposed on the buffer chamber(4), evacuating the buffer chamber(4) 8 is connected to a vacuum pump connected through short pipe(10) and air duct(9), a vacuum pump and(8) governor(7) attached to the cushion on the platform(6); bleeding probe above the bottom end is located in a temperature-controlled platform 5-10 mm at.
(CN105154868) LEGAL DETAILS FOR CN105154868 Actual or expected expiration date=2035-08-28 Legal state=ALIVE Status=PENDING Event publication date=2015-08-28 Event code=CN/APP Event indicator=Pos Event type=Examination events Application details Application country=CN CN201510544088 Application date=2015-08-28 Standardized application number=2015CN-0544088 Event publication date=2015-12-16 Event code=CN/A Event type=Examination events Published application Publication country=CN Publication number=CN105154868 Publication stage Code=A Publication date=2015-12-16 Standardized publication number=CN105154868 Event publication date=2015-12-16 Event code=CN/C06 Event indicator=Pos Event type=Examination events Publication Event publication date=2016-01-13 Event code=CN/C10 Event type=Examination events Request of examination as to substance
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