一种​基于​抽气​方法​的​纳米​涂层​沉积​装置​及​方法

源语言标题
(CN105154868) 一种​基于​抽气​方法​的​纳米​涂层​沉积​装置​及​方法
公开号/公开日
CN105154868 A 2015-12-16 [CN105154868] / 2015-12-16
申请号/申请日
2015CN-0544088 / 2015-08-28
发明人
YANG QUANSAN;HAO PENGFEI;HE FENG;
申请人
TSINGHUA UNIVERSITY;
主分类号
IPC分类号
C23C-024/08
摘要
(CN105154868) 一种​基于​抽气​方法​的​纳米​涂层​沉积​装置​及​方法,用于​获得​均匀​的​纳米​涂层。所​述​装置​包括​稳定​基座、控​温​平台、缓冲​平台​上​和​抽气​系统,控​温​平台​设置​在​稳定​基座​上,基底​放置​在​控​温​平台。抽气​系统​包括​抽气​管、抽气​缓冲​腔、导​气管、真空泵​以及​调速器。本​发明​结构​简单,操作​方便,其​技术​特点​是​通过​从​基底​上方​抽气​的​方法​改变​蒸发​过程中​液​滴​内部​流动​方向,使​壁面​液​滴​内部​的​纳米​颗粒​向​边缘​运动,从而​可以​消除​咖啡​环​现象,实现​颗粒​的​均匀​沉积。
地址
代理人
代理机构
;
优先权号
2015CN-0544088 2015-08-28
主权利要求
(CN105154868) 1. A nano-coating deposition apparatus based on a pumping method, characterized in: device includes a stabilizing base(1), a temperature-controlled platform(2), a buffer platform(6) and the exhausting system; a temperature-controlled platform(2) disposed on the base(1) in a stable; pumping system includes a suction pipe(12), the evacuation buffer chamber(4), connecting nipples(10), tracheal tube(9), the vacuum pump and(8) governor(7); suction in the suction pipe(12) disposed on the buffer chamber(4), evacuating the buffer chamber(4) 8 is connected to a vacuum pump connected through short pipe(10) and air duct(9), a vacuum pump and(8) governor(7) attached to the cushion on the platform(6); bleeding probe above the bottom end is located in a temperature-controlled platform 5-10 mm at.
法律状态
(CN105154868) LEGAL DETAILS FOR CN105154868  Actual or expected expiration date=2035-08-28    Legal state=ALIVE    Status=PENDING     Event publication date=2015-08-28  Event code=CN/APP  Event indicator=Pos  Event type=Examination events  Application details  Application country=CN CN201510544088  Application date=2015-08-28  Standardized application number=2015CN-0544088     Event publication date=2015-12-16  Event code=CN/A  Event type=Examination events  Published application  Publication country=CN  Publication number=CN105154868  Publication stage Code=A  Publication date=2015-12-16  Standardized publication number=CN105154868     Event publication date=2015-12-16  Event code=CN/C06  Event indicator=Pos  Event type=Examination events  Publication    Event publication date=2016-01-13  Event code=CN/C10  Event type=Examination events  Request of examination as to substance
专利类型码
A
国别省市代码
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