Particle removal method using an aqueous polyphosphate solution 机翻标题: 暂无翻译,请尝试点击翻译按钮。

公开号/公开日
USRE46454 E1 2017-06-27 [USRE46454] / 2017-06-27
申请号/申请日
2015US-14986590 / 2015-12-31
发明人
BECK MARK JONATHAN;
申请人
FONTANA TECHNOLOGY;
主分类号
IPC分类号
B08B-003/00B08B-003/04C11D-003/06C11D-007/00C11D-007/16C11D-011/00C23G-001/00G03F-001/82H01L-021/02H01L-021/67
摘要
(USRE46454) A method and cleaning solution for cleaning electronic substrates, such as a semiconductor wafers, hard disks, photomasks or imprint molds.  The method comprises the steps of contacting a surface of the substrate with a cleaning solution comprised of a polyphosphate, and then removing the cleaning solution from the surface.  Additional optional steps include applying acoustic energy to the cleaning solution while the cleaning solution is in contact with the surface, and removing the cleaning solution from the surface by rinsing the surface with a rinsing solution with or without the application of acoustic energy.  The cleaning solution comprises a polyphosphate, such as any of the water soluble polyphosphates.  Depending on the application, the cleaning solution may also comprise a base and/or a quantity of suspended particles.  Complexing agents, amines, biocides, surfactants and/or other substances, may also be added to the cleaning solution.
机翻摘要
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地址
代理人
代理机构
;
优先权号
2007US-60888859 2007-02-08 2008US-12069205 2008-02-07 2011US-13316540 2011-12-11 2015US-14986590 2015-12-31
主权利要求
(USRE46454) 1. A method for cleaning a hard disk comprising: contacting a surface of a hard disk with a cleaning solution consisting of a polyphosphate, water and a base, the surface of the hard disk having a plurality of submicron particles adhered to th
法律状态
(USRE46454) LEGAL DETAILS FOR USRE46454  Actual or expected expiration date=2028-02-07    Legal state=ALIVE    Status=GRANTED     Event publication date=2015-12-31  Event code=US/APP  Event indicator=Pos  Event type=Examination events  Application details  Application country=US US14986590  Application date=2015-12-31  Standardized application number=2015US-14986590     Event publication date=2015-12-31  Event code=US/EXMR  Event type=Administrative notifications  USPTO Examiner Name Primary Examiner: TORRES VELAZQUEZ, NORCA LIZ    Event publication date=2015-12-31  Event code=US/ART  Event type=Administrative notifications  USPTO Art Group  ART=3991     Event publication date=2015-12-31  Event code=US/DK  Event type=Examination events  Attorney Docket Number Docket Nbr: 99-2130 Customer Nbr: 40758    Event publication date=2015-12-31  Event code=US/ENT  Event type=Administrative notifications  Business Entity Status: SMALL    Event publication date=2015-12-31  Event code=US/AIA  Event type=Administrative notifications  First Inventor File Indicated:  AIA=No     Event publication date=2015-12-31  Event code=US/ENTYSTA  Event type=Administrative notifications  Entity Status Set to Undiscounted    Event publication date=2016-04-13  Event code=US/APPFILEREC  Event type=Administrative notifications  Event type=OAO  Filing Receipt    Event publication date=2016-04-13  Event code=US/SMALL  Event type=Administrative notifications  Appl Has Filed a Verified Statement of Micro to Small Entity Status    Event publication date=2016-04-18  Event code=US/DOCK  Event indicator=Pos  Event type=Examination events  Case Docketed to Examiner in GAU    Event publication date=2016-05-12  Event code=US/IDS  Event type=Examination events  Event type=OAI  Information Disclosure Statement Filed    Event publication date=2016-06-16  Event code=US/DOCK  Event indicator=Pos  Event type=Examination events  Case Docketed to Examiner in GAU    Event publication date=2017-02-24  Event code=US/NOAM  Event indicator=Pos  Event type=Examination events  Event type=OAO  Mail Notice of Allowance    Event publication date=2017-05-11  Event code=US/AS  Event type=Change of name or address  Event type=Reassignment  Assignment Owner: FONTANA TECHNOLOGY, CALIFORNIA  Effective date of the event=2008-02-07  ASSIGNMENT OF ASSIGNORS INTEREST ASSIGNOR:BECK, MARK JONATHAN REEL/FRAME:042347/0741     Event publication date=2017-05-19  Event code=US/APRDY  Event indicator=Pos  Event type=Examination events  Application Is Considered Ready for Issue    Event publication date=2017-06-07  Event code=US/ISSM  Event indicator=Pos  Event type=Examination events  Event type=OAO  Issue Notification Mailed    Event publication date=2017-06-27  Event code=US/E1  Event indicator=Pos  Event type=Event indicating In Force  Reissue  Publication country=US  Publication number=USRE46454  Publication stage Code=E1  Publication date=2017-06-27  Standardized publication number=USRE46454
专利类型码
E1
国别省市代码
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